Table 1. Specifications of grinding system Grinding machine Machining center: VQC- 15/40 (YAMAZAKI MAZAK) Grinding wheel Cast iron fiber bonded diamond wheel Diameter: 150mm, Width: 10mm, Mesh number: #8000 Mirror material SiC Microcomputer PC-9801NS (80386SX, 12MHz) Amplifier Driving circuit Micro- Displacement table